BOC Edwards Dry Pumps
For nearly 100 years, Edwards has delivered the highest quality vacuum pumps that support a broad spectrum of applications – from laboratory to the most demanding semiconductor and industrial processes.
The design of the Edwards GV dry pumps is based on the well-proven claw technology for dry pumps. Two pairs of claw shaped rotors on two shafts rotate in opposite directions to trap and compress the process gas which flows along the axis of the shafts between the claw pairs. During each complete rotation of the claws, first the inlet port of each claw pair is exposed (to admit gas to the pump), then both the inlet and outlet are isolated (to trap and compress the gas), and then the outlet is exposed (to expel the compressed gas).
The GV160 Drystar pumps have a displacement of (200m3hr-1) and can be coupled with the Edwards EH series mechanical booster for increased pumping performance.
For more information call Pumps International about all of our Vacuum Pumps and Blowers. Call sales by clicking here to contact us about vacuum pumps. We also rebuild pumps and blowers and buy used ones.
The GV400 Drystar pumps have a displacement of (425m3hr-1) and can be coupled with the Edwards EH series mechanical booster for increased pumping performance.
The GV600 Drystar pumps have a displacement of (793m3hr-1) and can be coupled with the Edwards EH series mechanical booster for increased pumping performance.
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
All figures are typical without gas ballast. For more information call Pumps International about all of our Vacuum Pumps and Blowers. Call sales by clicking here to contact us about vacuum pumps. We also rebuild pumps and blowers and buy used ones.
The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.
The iH80 system has an HCDP80 dry pump; The HCDP pump has enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.
The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system.
You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.
For more information call Pumps International about all of our Vacuum Pumps and Blowers. Call sales by clicking here to contact us about vacuum pumps. We also rebuild pumps and blowers and buy used ones.
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
For more information call Pumps International about all of our Vacuum Pumps and Blowers. Call sales by clicking here to contact us about vacuum pumps. We also rebuild pumps and blowers and buy used ones.
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
All figures are typical without gas ballast
For more information call Pumps International about all of our Vacuum Pumps and Blowers. Call sales by clicking here to contact us about vacuum pumps. We also rebuild pumps and blowers and buy used ones.
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
All figures are typical without gas ballast.
For more information call Pumps International about all of our Vacuum Pumps and Blowers. Call sales by clicking here to contact us about vacuum pumps. We also rebuild pumps and blowers and buy used ones.
Please call for more specs
For more information call Pumps International about all of our Vacuum Pumps and Blowers. Call sales by clicking here to contact us about vacuum pumps. We also rebuild pumps and blowers and buy used ones.
The iQ Drypumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed.
The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools.
This Edwards QDP-40 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.
This Edwards QDP-80 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.
These BOC Edwards DP-40 Dry Vacuum Pump "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing.
For more information call Pumps International about all of our Vacuum Pumps and Blowers. Call sales by clicking here to contact us about vacuum pumps. We also rebuild pumps and blowers and buy used ones.
This Edwards DP-80 DP80 DP 80 Dry Vacuum Pump Rebuilt is a four-stage, positive displacement rotary pump. These "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing applications. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.
Please call for specs
The Edwards EPX high vacuum dry pumps offer on-tool pumping in a lighter and smaller package, requiring only 1.4 kW of power. Using a unique, patented, single-shaft regenerative/Holweck® stage mechanism, EPX series pumps are capable of pumping from atmosphere to ultimate pressures with no risk of process contamination.
The compact EPX 180N offers enhanced performance with reduced cost of ownership, and is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. The N series includes a gas module that provides nitrogen purge extending the application range to medium processes in which low levels of corrosive vapors and particulates are expected.
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20 lighter, 30 smaller and requires 40 less power than the IPX.
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.
Manuals require Adobe Reader.
Link opens in a new window. If you have pop-up blocker enable press and hold 'ctrl' button when clicking the link.